Function
· Transfer wafer from stack to cassette

Compatible wafer size
· 156*156±0.5mm~166*166±0.5mm

Compatible cassette
· 100 slot cassette

Description

· The equipment using “U” type mechanism for convenient operation.
· Including wafer stacking and inspection function.
· Cassette in and out tracks are driven by motors and the tracks can buffer 3 cassettes.
· The cassette lifting up mechanism is driven by servo motor
· Including buffer function to increase the equipment throughput.
· Before wafer running into the buffer, using clamp cylinder to align. Before wafer running into cassette, using guide bar to align.
· For operating conveniently, empty cassettes loading from upper track and full cassette unloading from lower track.

Specifications

· Loading method: Stack
· Unloading method: 100 slot cassette
· Throughput: ≥ 8000 pieces / hour
· Fragmentation rate: ≤0.03%, (A type wafer, only statistics of broken caused by automation)
· Up Time: 98.5%
· MTBF≥500 hours
· MTTR ≤ 1 hour
· Reserve MES interface to support data upload